Fredrik Thordendal and Mårten Hagström, both of whom play in Meshuggah should be credited with having a rather enormous influence on hundreds of modern metal bands of many different kinds. I'm not sure which of the two dudes is the one mainly responsible for the band's sound.
Stephen Carpenter and Chino Moreno of Deftones both had a lot of influence on modern metal as well. I think Stephen Carpenter is the one who mainly writes the guitar bits, while Chino plays rhythm and does the vocals.
I'm pretty sure there's some death metal guitarists who also deserve credit, but I'm not sure who would be the first to take things down that road and popularize it. Chuck Chuldiner of Death might be a bit too late to really start playing something that sounds like death metal. That band had a strong thrash vibe in the beginning.
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